Michell Instruments QMA401 Trace Moisture Analyzer High range (50 ppmv) Material certificate to BS EN 10204, type 3.1 Input pressure regulator / fast-loop bypass, 15μm internal filtration

The next generation Advanced Quartz Crystal Microbalance analyzer from Michell Instruments is designed to provide reliable, fast and accurate measurement of trace moisture content in a variety of applications where keeping moisture to a minimum is of critical importance.

The analyzer provides consistently accurate measurements of trace moisture. This consistency is achieved using a self-calibration system, which adjusts the sensor with reference to an internal moisture generator. The moisture generator is supplied with a calibration traceable to NPL and NIST, so long term stability of its measurements is guaranteed.

The analyzer utilizes a mass flow controller to ensure precise control of the sample and reference gas flows to ±0.1ml/ min. Coupled with a pressure transducer, this system ensures continued accuracy of measured and calculated parameters even during fluctuations in sample pressure.

Applications for the QMA401 include:

• High purity gas production
• Air separation plants
• Semiconductor CVD chamber cleaning
• Semiconductor etching chambers
• H2 coolant for generators
• Polymer chip drying